Into The Nano Era: Moore's Law Beyond Planar Silicon CMOS - download pdf or read online

By Howard Huff

ISBN-10: 3540745580

ISBN-13: 9783540745587

Even as we tentatively input the nanotechnology period, we're now encountering the fiftieth anniversary of the discovery of the IC. Will silicon stay the pre-eminent fabric and should Moore’s legislations proceed unabated, albeit in a broader monetary venue, within the nanotechnology period? This monograph addresses those matters via a re-evaluation of the medical and technological foundations of the micro-electronics period. It additionally good points visionary articles of Nobel laureates.

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Wilson, Proc. R. Soc. Lond. A 134, 277 (1931) 10. H. Wilson, Proc. R. Soc. Lond. A 371, 39 (1980) 11. H. Wilson, Semi-conductors and Metals (Cambridge University Press, Cambridge, 1939) 12. H. Scaff, Metall. Trans. 1, 561 (1970) 13. S. S. Sree Harsha, Principles of Growth and Processing of Semiconductors (McGraw-Hill, Boston, 1999) 14. S. Mahajan, Prog. Mat. Sci. 49, 487 (2004) 15. M. Riordan, L. W. Norton, New York, 1997) 16. M. Spearing, Acta Mater. 48, 179 (2000) 17. P. A. H. M. Spearing, T.

The most commonly used lithography tool of the day, the projection aligner, would not make it to this generation because it lacked the overlay alignment capability. Something new had to be developed and the industry was not ready. The transition to stepping aligners proved much more traumatic than anyone expected. Steppers had the potential for very high yields. But unless the reticle was perfect and had no particles, yield would be zero because the stepper would repeat these defects. The result was a three-year hiatus in Moore’s law.

Danzebrink, M. Gläser, U. Kuetgens, A. Nicolaus, D. Schiel, P. de Bièvre, S. Valkiers, P. D. 1 Introduction One hundred nanometers is a fundamental technology landmark. It is the demarcation point between microtechnology and nanotechnology. The semiconductor industry crossed it just after the second millennium had finished. 4 microns); to integrated circuits which were popularized as microchips; and then as the third millennium dawned, nanochips. At this writing, nanochips are the largest single sector of nanotechnology.

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Into The Nano Era: Moore's Law Beyond Planar Silicon CMOS by Howard Huff


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